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苏联最近研制了一种最新的包括四个低温泵的无油低温真空机组,它用干100米3以下的容器无油抽气真空设备,压力范围在10～5-4×10-6帕之内。 为了从真空室里抽出≥87%的气体,便使用由液氮冷却的具有下列参数的AKΦ-1型前级冷凝真空泵:工作压强范围100-11.5仟帕;极限压强9.3仟帕;?
The Soviet Union recently developed a new oil-free, low-temperature vacuum unit that includes four cryogenic pumps. It uses oil-free vacuuming equipment for dry containers up to 100 m 3 and pressures in the range of 10 to 5-4 × 10-6 Pa Inside. In order to extract more than 87% of the gas from the vacuum chamber, an AKΦ-1 pre-condensation vacuum pump cooled by liquid nitrogen with the following parameters is used: working pressure range 100-11.5 kPa; ultimate pressure 9.3 kPa;