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探讨在 i- C(离子辅助沉积)硬质无定形碳膜和钢基基片之间加入碳化钛( TiC)过渡层,以 增加膜 /基附着力和结合强度的各种优越性。 SEM(扫描电镜)和 EPMA(电子探针微分析)测试显 示 TiC中间过渡层与 i- C层及基片的界面处的附着结合强度得以改善。划痕测试仪对该复合膜 测试则从另一方面提供了膜 /基结合强度提高的证据。对该复合膜的宏观机械力学性能的测试表 明,它在提高了膜 /基结合强度的同时,保持了类金刚石薄膜超高硬度和低摩擦系数的优良特性。
In this paper, we discuss the advantages of adding titanium carbide (TiC) transition layer between i-C (ion-assisted deposition) rigid amorphous carbon film and steel substrate to increase the adhesion of film / substrate and the bonding strength. SEM (Scanning Electron Microscopy) and EPMA (Electro-Probe Microanalysis) tests have shown that the bond strength at the interface of the TiC intermediate layer with the i-C layer and the substrate is improved. Scratch tester on the composite film test on the other hand provides evidence of increased film / substrate bonding strength. The macroscopic mechanical properties of the composite film test showed that it improves the film / base bonding strength, while maintaining the diamond-like diamond film ultra-high hardness and low friction coefficient of the excellent properties.