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我们使用上海有色光学玻璃厂生产的硼微晶玻璃片作为P型扩散源,生产硅高频大功率晶体管.在使用过程中,我们感到硼微晶玻璃片有以下的优点:(1)扩散的均匀性和重复性好.同一批硅外延片,经扩散后,不同硅片上扩散层的方块电阻R_n很相近.不同批次的硅外延片,按照同一工艺条件进行扩散,也能得到很相近的方块电阻和结深.(2)使用方便.硼微晶玻璃片不需进行活化处理,性能稳定,不易粘片,不易粘石英
We use the boron crystallized glass plate produced by Shanghai Nonferrous Optical Glass Factory as the P-type diffusion source to produce high-power silicon high-power transistors. During the process, we feel that the boron crystallized glass plate has the following advantages: (1) Uniformity and repeatability of the same number of silicon epitaxial wafers, after diffusion, the diffused layer on different silicon sheet resistance R n is very similar to different batches of silicon epitaxial wafers, in accordance with the same process conditions for diffusion, can be very similar Of the box resistance and junction depth. (2) easy to use. Boron glass-ceramic sheet without activation treatment, stable performance, not easy to stick piece, not easy to stick quartz