论文部分内容阅读
本文研究多点法机床主轴回转运动准确度测量系统中的关键技术。以8阶Butterworth滤波器MAX291为核心改进了电容测微仪系统的动态测量电路,改进后的电容测微仪在±10μm的量程内,非线性误差最大不超过0.8%,重复性准确度优于0.15%,测量准确度优于0.1μm,频响范围达4.2kHz。研究了电容测微仪动态灵敏度及线形度的测试与标定方法。开发了符合方法要求的多路并行测量系统
This paper studies the multi-point machine tool spindle slew motion accuracy measurement system of key technologies. The 8-order Butterworth filter MAX291 is used as the core to improve the dynamic measurement circuit of the capacitance micrometer system. The improved capacitance micrometer has a maximum non-linearity error of less than 0.8% within the range of ± 10μm, and the repeatability accuracy is better than 0.15%, measurement accuracy better than 0.1μm, frequency response range up to 4.2kHz. The testing and calibration methods of dynamic sensitivity and linearity of capacitance micrometer are studied. Developed in line with the method requirements of the multi-channel parallel measurement system