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膜基反射镜的面形控制是研制膜基反射镜的关键技术之一。设计了一种基于模糊逻辑控制技术的膜基反射镜面形控制系统,包括面形设计、面形控制、面形分析和面形控制仿真等功能模块。采用Visual C#和MATLAB混合编程来实现系统功能,并在仿真系统中嵌入了ANSYS有限元分析功能。采用控制反射镜中心截面矢高的方法设计控制器,利用Zernike多项式拟合得到膜基反射镜的面形及其像差。对口径为300 mm、F/5的膜基反射镜进行了面形控制和扰动响应仿真分析,最终得到面形误差RMS值为71λ(λ=632.8 nm),在相同条件下,该结果与根据薄膜大扰度形变理论得到的面形误差结果相一致。
Surface-based control of film-based mirrors is one of the key technologies for the development of film-based mirrors. A control system based on fuzzy logic control is designed, which includes surface design, surface control, surface analysis and surface control simulation. Using Visual C # and MATLAB hybrid programming to achieve system functions, and embedded in the simulation system ANSYS finite element analysis. The controller is designed by controlling the cross-sectional height of the center of the mirror, and the surface shape and the aberration of the film-based mirror are obtained by using the Zernike polynomial fitting. The surface shape control and perturbation response of the film-based mirror with a diameter of 300 mm and F / 5 were simulated and analyzed. The RMS value of the surface shape error was 71λ (λ = 632.8 nm). Under the same conditions, The results of the surface shape error obtained from the theory of film large disturbance distortion are consistent.