论文部分内容阅读
讨论了PLT15铁电薄膜的溶胶－凝胶制备技术,及PLT薄膜的结构和电性能研究.结果表明,在SI基片上成功地生长出钙钛矿型结构多晶铁电薄膜,在(111)PT/TI/SIO2/SI上外延生长出(111)PLT15铁电薄膜.溶胶－凝胶制备的PLT15铁电薄膜具有优良的热释电性能,其热释电系数P为5.25*10－8CCM－2K－1,电压响应率优值FV达到0.78*10－10CCM/J,探测率优值FM为1.13*10－8CCM/J,适于制备热释电红外探测器“,”This paper investigated the preparation of the PLT15 thin film by Sol Gel process and crystallographic、dielectric and pyroelectric properties.We have succeeded in preparation of perovskite structure polycrystalline PLT15 ferroelectric thin film on Si substrate and growth epitaxial (111)PLT15 thin film on(111)Pt/Ti/SiO 2/Si substrate.The PLT thin film have good pyroelectric properties.The pyroelectric coeffient、figure of merit for voltage responsivity ...