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椭偏光谱由于其独特性而广泛应用于薄膜材料的光学特性研究.文章综述了椭偏光谱数据处理中常用的物理模型,并对椭偏光谱的一般方法作了总结.“,”Spectroscopic ellipsometry(SE) is suitable for the characterization of optical properties of thin films by its novel.The problems of data analysis for SE are reviewed and discussed.The opinion on data analysis for SE is summarised.