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近十几年来,与电子相互依存的带电粒子——离子束技术在微分析科学中显示了重要的作用,并日益成为一种与电子束技术相互补充的不可缺少的分析手段。本文从离子束与电子束的对比及其相互关系方面阐述离子束技术在微分析中的作用和与电子束相结合的前景。
In the last decade or so, charged ion-beam technology with interdependence of electrons has been shown to play an important role in microanalysis science and is increasingly becoming an indispensable analytical tool that complements electron beam technology. This paper describes the role of ion beam technology in microanalysis and the prospect of combining it with electron beam from the contrast between ion beam and electron beam and their correlation.