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TDS-27/20型硅芯炉是在真空或气氛(充以某种保护气体)条件下专门生产细硅芯棒的设备。细硅芯棒是生产多晶硅棒的必要元件,多晶硅棒则是生产单晶硅棒的基体,而单晶硅棒则是生产集成电路必不可少的材料。故硅芯炉是半导体材料厂必不可少的设备之一。TDS-27/20型硅芯炉工作时将直径不大于φ30mm的粗硅棒夹在硅芯炉下轴夹头上,下轴转
TDS-27/20 type silicon furnace is in the vacuum or atmosphere (filled with some protective gas) under the conditions of specialized production of thin silicon core rod equipment. Fine silicon mandrel is an essential element for the production of polycrystalline silicon rods. Polycrystalline silicon rods are the substrate for the production of monocrystalline silicon rods. Monocrystalline silicon rods are an indispensable material for the production of integrated circuits. So silicon core furnace is one of the indispensable equipment in semiconductor material factory. TDS-27/20-type silicon furnace work diameter of not more than φ30mm thick silicon rods sandwiched in the silicon core under the shaft chuck, the next axis turn