荧光X射线实验系数法测定ZnO压电簿膜厚度

• 作 者: 杨先华
• 机 构: 一四二六研究所五室
• 出 处: 压电与声光
• 发表日期: 1980年06期
• 关键词: 压电 压电薄膜 薄膜厚度 平均相对误差 厚度均匀性 系数法 三元系 标准样品 测量精度 厚度测量

本法用标准样品的实验值来确定厚度计算公式中的两个系数。它既可测定厚度均匀性较差的ZnO压电薄膜的平均厚度,又可测定它的厚度不均匀性(即某一小区域的薄膜厚度)。 本文介绍了实验系数的确定方法, 给出了ZnO压电薄膜厚度的计算公式。介绍了对提高测量精度有帮助的限光板和样品夹具,计算了本法的绝对误差(不大于700埃)和平均相对误差(不大于5％)。 并将本法与其它厚度测量方法进行了比较和讨论。 其它类似的二元系,三元系,…薄膜,也可参照本法测定它们的厚度。

This method uses the experimental values ​​of standard samples to determine the two coefficients in the thickness calculation formula. It can not only measure the average thickness of ZnO piezoelectric film with poor thickness uniformity, but also determine the thickness non-uniformity (ie, the film thickness of a small area). In this paper, the determination of the experimental coefficient is introduced, and the formula for calculating the thickness of ZnO piezoelectric film is given. This paper introduces the light-limiting plate and the sample holder which are helpful to improve the measurement precision. The absolute error (not more than 700 A) and the average relative error (not more than 5%) of this method are calculated. This method is compared with other thickness measurement methods and discussed. Other similar binary system, ternary system, ... thin film, but also with reference to the determination of their thickness.