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本文测量HFCVD生长的金刚石膜的红外透射率。结果表明 ,膜中的缺陷、杂质和非金刚石相在透射谱中产生吸收带 ;膜表面的粗糙度和组织形貌对透射率有较大的影响。形核表面面对红外光源时 ,由于减少表面散射而透射率较高 ;定向或高取向膜的透射率高于混杂取向膜的透射率 ,表明晶格取向和晶界分布影响膜的透射性能。
This article measures the infrared transmittance of diamond films grown by HFCVD. The results show that the defects, impurities and non-diamond phases in the film produce absorption bands in the transmission spectrum. The roughness and the morphology of the film surface have a great influence on the transmittance. The transmissivity of the oriented or highly oriented film is higher than that of the hybrid oriented film when the nucleating surface faces the infrared light source due to reduced surface scattering, indicating that the lattice orientation and grain boundary distribution affect the transmissivity of the film.