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在XTP分析室内利用超高真空蒸发方法在单晶硅衬底上沉积酞菁铜薄膜,并利用X光电子谱(XTP)作原位分析,研究酞菁铜薄膜的沉积规律,并讨论了不同条件下酞菁铜配合物分子组成及结构的变化。结果发现利用超高真空沉积方法得到酞菁铜为近化学计量,随着蒸发温度的升高,分子中Cu原子的含量逐渐减少,N原子的含量逐渐升高,苯环上的碳原子与类朴啉环上的碳原子的比例逐渐减少,这与酞菁铜分子中各原子的价键状态、酞菁铜分子的晶型及聚合程度有关。
The deposition of copper phthalocyanine thin films on monocrystalline silicon substrates by ultra-high vacuum evaporation in XTP analysis room and the deposition of copper phthalocyanine films by X-ray photoelectron spectroscopy (XTP) were studied. The effects of different conditions Molecular Composition and Structure Changes of Copper Phthalocyanine Complexes. The results show that copper phthalocyanine obtained by ultra-high vacuum deposition is nearly stoichiometric. With the increase of evaporation temperature, the content of Cu atoms in the molecule decreases and the content of N atom increases gradually. The number of carbon atoms on the benzene ring The ratio of carbon atoms in the piror ring gradually decreases, which is related to the valence state of each atom in the copper phthalocyanine molecule and the crystal form of the copper phthalocyanine molecule and the degree of polymerization.