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基于TDX-200透射电子显微镜(Transmission Electron Microscope,TEM),利用ANSYS软件仿真物镜磁路存在空隙、凹陷、凸起缺陷时物镜轴上的磁场分布,在此基础上利用MEBS软件仿真物镜激励、球差系数等性能参数,分析了各磁路缺陷对物镜分辨率的影响。结果表明,在相同加速电压下,相对于空隙缺陷、凸起缺陷对物镜分辨率的影响,凹陷缺陷对物镜分辨率的影响最大。在200k V加速电压下,当物镜存在直径为0.5mm的半圆形凹陷环缺陷时,实际分辨率相对于理想分辨率的变化量可达到9.68%。
Based on TDX-200 Transmission Electron Microscope (TEM), the distribution of magnetic field on objective lens axis with gap, concave and convex defect is simulated by ANSYS software. Based on this, MEBS software is used to simulate the excitation of the objective lens Difference coefficient and other performance parameters, the impact of each magnetic path defect on the objective resolution is analyzed. The results show that under the same accelerating voltage, the effect of convex defects on the resolution of objective lens and the influence of concave defects on the resolution of objective lens are the most significant. At 200kV accelerating voltage, when the objective lens has a semicircular concave ring defect with a diameter of 0.5mm, the actual resolution can reach 9.68% with respect to the ideal resolution.