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固定电荷Q_(ss)和可动电荷Q_0是表征热生长氧化层质量的重要工艺参数之一,其大小直接影响IC器件的成品率及其后的稳定性和可靠性。本文介绍一种用Au球代替普通蒸Al(或Au)的快速C-V测量法,及其作为IC工艺在线监控用的一些初步实验结果。
The fixed charge Q_ (ss) and the movable charge Q_0 are one of the important process parameters that characterize the quality of the thermally grown oxide layer. Their size directly affects the yield of IC devices and their subsequent stability and reliability. This paper introduces a rapid C-V measurement method using Au balls instead of ordinary steamed Al (or Au), and some preliminary experimental results as an on-line monitoring of IC process.