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“魔镜”技术是我国西汉时期的一项创造发明，由此引发出的“魔镜”检测方法现在已被有效地应用于各种镜状表面缺陷的检测。本文介绍了“魔镜”检测原理以及我们采用激光技术发展起来的一种“魔镜”检测方法，并简要报道了用“魔镜”方法检测硅外延片表面缺陷及晶体内部生长不均匀等缺陷的最新成果。
The “magic mirror” technology is a creation invention in the Western Han Dynasty in China. The “magic mirror” detection method has been effectively applied to the detection of various mirror-like surface defects. This article introduces the principle of “magic mirror” detection and a kind of “magic mirror” detection method that we developed by using laser technology, and briefly reports the use of “magic mirror” method to detect the surface defects of silicon epitaxial wafers and the uneven growth of crystals The latest achievements.