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半导陶瓷湿度传感器是用固相反应和粉末压片烧结的方法制作，它以二氧化锆、二氧化硅、五氧化二磷为主料，并且掺杂三氧化二钇和五氧化二铌．借助于高分辨率的四角和单斜二氧化锆的激光拉曼标准谱，二氧化锆晶粒的微结构显然在未掺杂和用三氧化二钇或五氧化二铌掺杂的样品中分别属于单斜和四角对称晶系．它们在激光显微镜下发出可以区分的不同色彩的荧光．未掺杂的二氧化锆晶粒是线度为１～２μｍ的斜角四边形，而掺杂烧结的晶粒是尺寸大到３～１０μｍ的正方形，后者有利于减小半导陶瓷传感器的电阻率
Semi-conductive ceramic humidity sensor is made by solid phase reaction and powder tablet sintering method, which is based on zirconium dioxide, silicon dioxide, phosphorus pentoxide as the main material, and doped yttrium oxide and niobium pentoxide. The microstructure of the zirconium dioxide grains apparently differs from that of the undoped and yttrium doped or niobium pentoxide doped samples, respectively, by means of laser Raman standard spectra of high resolution tetragonal and monoclinic zirconium dioxide Belong to monoclinic and tetragonal symmetry crystal system. They emit distinctively colored fluorescence under a laser microscope. Undoped zirconium dioxide grains are beveled quadrilaterals with a linearity of 1 to 2 μm and doping-sintered grains are square with a size of 3 to 10 μm, which is advantageous for reducing the resistance of the semi-conductive ceramic sensor rate