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用磁控溅射法在加热到400℃的MgO(001)单晶基片上沉积了总厚度为25nm的[Fe(0.6nm)/Fe30.5Pt69.5(1.9nm)]10多层连续薄膜,总成分配比为Fe50Pt50.然后对其在[500,900]℃温度范围进行真空热处理,分析了热处理温度对薄膜表面形貌、晶体结构以及磁特性的影响.结果表明,在加热基片上生长的FePt薄膜,层间已经发生扩散,形成无序的A1相.经过700℃以上的高温热处理,薄膜转变为具有(001)织构的L10相FePt合金,易磁化轴沿垂直于膜面的方向,有序度大于0.85,单轴磁晶各向异性能约2.7×107erg/cc.利用扩散后残存的周期性微弱成分起伏,可以使薄膜在800℃以下保持形貌连续.用原子力显微镜对薄膜表面进行观察证实,在780℃进行热处理,薄膜的表面最平整.这种优质的连续薄膜可以应用于微加工制作超高密度垂直磁记录阵列介质.
A 10-layer continuous thin film of [Fe (0.6nm) /Fe30.5Pt69.5 (1.9nm)] was deposited by magnetron sputtering on a MgO (001) single crystal substrate heated to 400 ° C with a total thickness of 25 nm, The ratio of the total composition is Fe50Pt50, and then the vacuum heat treatment in the temperature range of [500,900] ℃, the influence of the heat treatment temperature on the surface morphology, crystal structure and magnetic properties of the film is analyzed. The results show that the FePt film grown on the heated substrate , The interlayer has been diffused to form a disordered A1 phase.After 700 ℃ high temperature heat treatment, the film is transformed into a (001) texture of the L10 phase FePt alloy, easy magnetization axis along the direction perpendicular to the membrane surface, ordered Degree of more than 0.85, uniaxial magnetocrystalline anisotropy of about 2.7 × 107erg / cc.Using the periodic residual weak component fluctuations after the diffusion, the film can be maintained below 800 ℃ continuous morphology Topography was observed by atomic force microscopy Confirmed that the heat treatment at 780 ℃, the most smooth surface of the film. This high-quality continuous film can be used for micro-fabrication of ultra-high density perpendicular magnetic recording medium.