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通过非平衡磁控溅射的方法制备了不同C含量的ZrCN复合薄膜,采用XPS,XRD,SEM,AFM,纳米压痕仪和摩擦磨损仪等对薄膜的化学成分、微结构、表面形貌、力学性能及摩擦磨损性能进行了研究.结果表明,ZrCN薄膜中(C+N)/Zr原子比对薄膜的相组成、微结构和力学性能都有很大的影响.当(C+N)/Zr原子比小于1时,C进入ZrN的晶格间隙并形成Zr(C,N)固溶体.而当(C+N)/Zr原子比大于1时,多余的C形成非晶态的CN或单质C,ZrCN复合膜呈fcc结构.随着C含量升高,ZrCN复合膜的硬度先增大后减小,而摩擦系数逐渐减小,磨损所产生的磨痕逐渐变窄、变浅.C的加入使得ZrCN复合膜的摩擦磨损形式发生改变,摩擦磨损性能得到提高.含C量为13.2%的ZrCN薄膜硬度达到31 GPa,摩擦系数仅为0.26,综合具备了硬度高、摩擦磨损性能好的优良特点.
The ZrCN composite films with different content of C were prepared by unbalanced magnetron sputtering. The chemical composition, microstructure, surface morphology and mechanical properties of the films were investigated by XPS, XRD, SEM, AFM, Mechanical properties and friction and wear properties of ZrCN films were investigated.The results show that the atomic ratio of (C + N) / Zr has a great effect on the phase composition, microstructure and mechanical properties of ZrCN films.When the (C + N) When the atomic ratio of Zr is less than 1, C enters into the lattice space of ZrN and forms a solid solution of Zr (C, N), while when the atomic ratio of (C + N) / Zr is larger than 1, excess C forms amorphous CN or simple substance C, ZrCN composite film was fcc structure.With the increase of C content, the hardness of ZrCN composite film first increased and then decreased, while the friction coefficient decreased gradually, the wear scar formed by the wear became narrower and lighter.C The friction and wear properties of ZrCN composite films changed with the addition of ZrC, and the wear resistance of ZrCN composite films increased with the hardness of 31.2% and the friction coefficient of only 0.26. The ZrCN films with 13.2% C content had a high hardness and good friction and wear properties Features.