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本文提出一种有效提高真空封装硅微陀螺机械稳定性的方法.通过谐振增益与模态频差的参数灵敏度关系可知,随着模态频差的增大,机械谐振增益对模态频差的灵敏度减小,外界环境引起的模态频差的微弱抖动量决定驱动、敏感模态频率差的设计极大值,因此当频差设计值的变化量等于外界引起的频差抖动量且谐振增益满足应用需求时,真空封装硅微陀螺的机械稳定性达到最优.仿真结果表明机械稳定性提高12.7%,最佳封装气压约为5.3 kPa.实测结果表明,零漂提高到0.9 mV时,刻度因子的线性度为700×10-6,带宽提高3倍,约为89 Hz.该方法为真空封装硅微陀螺仪的参数优化提供了理论依据.
This paper presents a method to effectively improve the mechanical stability of micro-gyroscopes in vacuum-packaged silicon.According to the relationship between resonant gain and modal frequency deviation, we can see that with the increase of modal frequency difference, Sensitivity decreases, the jitter of the modal frequency difference caused by the external environment determines the design maximum of the driving and the sensitivity of the modal frequency difference. Therefore, when the variation of the frequency difference design value is equal to the frequency deviation jitter caused by the outside and the resonance gain The mechanical stability of the vacuum-packaged silicon micro-gyroscope is optimized when the application requirements are satisfied.The simulation results show that the mechanical stability is increased by 12.7% and the optimum package pressure is about 5.3 kPa.The measured results show that when the zero drift increases to 0.9 mV, The linearity of the factor is 700 × 10-6 and the bandwidth is increased by 3 times, which is about 89 Hz. This method provides the theoretical basis for the parameter optimization of vacuum micro-gyroscope.