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氧化锌薄膜通过金属有机化学气相沉积方法生长在康宁玻璃与α-蓝宝石衬底上,研究了有关薄膜的生长质量与发光特性。通过X光衍射方法测试研究发现,不仅在以α-蓝宝石为衬底的样品中,同时,在以玻璃为衬底的样品中都发现了氧化锌(002)方向生长的尖峰,表明生长在两种衬底上的样品都是高度的C向生长。对两种样品的荧光谱研究发现,两者的紫外峰位于374nm附近,在以α-蓝宝石为衬底的样品中,有深能级发射,但在以玻璃为衬底的样品中没有发现,表明在玻璃衬底上我们生长出了高质量的氧化锌薄膜。通过原子力显微镜,对生长在两种衬底上薄膜的表面形貌做了观察,其晶粒的大小与表面粗糙度有一定的差别,表明二者都是以柱状形式生长的。
ZnO thin films were grown on Corning glass and α-sapphire substrate by metal organic chemical vapor deposition. The growth quality and luminescence properties of the films were studied. X-ray diffraction method test study found that not only in the α-sapphire substrate samples at the same time, in the glass-based samples were found zinc oxide (002) direction of the growth of spikes, indicating growth in two Specimens on the substrate are highly C-grown. Fluorescence spectra of the two samples showed that the UV peaks of the two samples were located near 374 nm, and there was a deep level emission in the samples with α-sapphire as the substrate. However, no fluorescence was observed in the glass-based samples. This shows that on the glass substrate we have grown a high quality zinc oxide film. The surface morphology of the films grown on the two substrates was observed by atomic force microscopy. The grain size and surface roughness were different, indicating that both of them grew in columnar form.