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  5. INO OPTICAL MEMS DEVICES OPTICAL BEAM MANIPULATION, IMAGE PROJECTION AND IR RADIATION DETECTION

INO OPTICAL MEMS DEVICES OPTICAL BEAM MANIPULATION, IMAGE PROJECTION AND IR RADIATION DETECTION

来源 :2012传感器与MEMS技术产业化国际研讨会 | 被引量 : 0次 | 上传用户：zyx271724361
【摘 要】
：
In 2009，ASMC entered MEMS device foundry service for its strategic partners and customers. MEMS is an industry with its own rules, technologies, roadmaps, equipm
【作 者】
：
Kai SHAO 
【机 构】
：
AdvancedSemiconductorManufacturingCorporationLimited
【出 处】
：
2012传感器与MEMS技术产业化国际研讨会
【发表日期】
：
2012年9期
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论文部分内容阅读
In 2009，ASMC entered MEMS device foundry service for its strategic partners and customers. MEMS is an industry with its own rules, technologies, roadmaps, equipment and materials manufacturers. So ASMC has set up a new MEMS fab and intends to continue strategically expanding the MEMS products manufacturing facilities.
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