【摘 要】
：
Micro-nano manufacturing technology is a major basal technology to promote national economic, and it is a cutting-edge and high technology with strategic signif
【机 构】
：
HeiscurrentlyaprofessorinRoboticsInstituteinHarbinInstituteofTechnology,adirectorofRoboticsandMicros
【出 处】
：
2012传感器与MEMS技术产业化国际研讨会
论文部分内容阅读
Micro-nano manufacturing technology is a major basal technology to promote national economic, and it is a cutting-edge and high technology with strategic significance. This report will emphasized that under the support of the “863” Program of China, the research progress, industrialization, and base construction of Micro-nano design, machining, testing, packaging, device and system, and so on in our country. By combing the 12th Five-Year Program of China, the development strategy in micro-nano manufacturing technology field will be introduced.
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