Highly efficient grating coupler between optical fiber and silicon-on-insulator waveguide

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：hq10000002

【摘要】

：

Abstract:Integrated optical waveguides structures fabricated on SOI (silicon-on-insulator) based on MEMS (micro electron mechanical system) technology are promising for large scale integration and low

【作者】

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Yujian Jin Chenyang Xue Xiujian Chou Danfeng Cui Xiaogang Tong

【机构】

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Science and Technology on Electronic Test &Measurement Laboratory

【出处】

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2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

optical waveguide grating coupling

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Highly efficient grating coupler between optical fiber and silicon-on-insulator waveguide

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