【摘 要】
：
In the past one year 3DIC has become a hotspot in IC design industry. With this advanced technology, the Chip with Mems will be improve in performance, Power consumption, size.
【机 构】
：
Huazhong University of Science & Technology China
【出 处】
：
2012传感器与MEMS技术产业化国际研讨会
论文部分内容阅读
In the past one year 3DIC has become a hotspot in IC design industry. With this advanced technology, the Chip with Mems will be improve in performance, Power consumption, size.
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