【摘 要】
：
1. What is Plasma? How it happens? Plasma is a spark discharge phenomenon,to be more strictly: In physics and chemistry, plasma is a state of matter similar to gas in which a certain portion of the pa
【机 构】
：
Beijing JR Power Tech Co.,Ltd
【出 处】
：
2012传感器与MEMS技术产业化国际研讨会
论文部分内容阅读
1. What is Plasma? How it happens? Plasma is a spark discharge phenomenon,to be more strictly: In physics and chemistry, plasma is a state of matter similar to gas in which a certain portion of the particles are ionized.
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