【摘 要】
：
常压射频等离子体对反应性气体裂解效率高,辅以脉冲或者偏压调制,可以较好的调控沉积薄膜的结构形貌,由于沉积温度较低,在有机无机复合薄膜制备方面具有较好的应用性,如
【机 构】
：
中国上海201620,东华大学理学院
【出 处】
：
第十六届全国等离子体科学技术会议暨第一届全国等离子体医学研讨会
论文部分内容阅读
常压射频等离子体对反应性气体裂解效率高,辅以脉冲或者偏压调制,可以较好的调控沉积薄膜的结构形貌,由于沉积温度较低,在有机无机复合薄膜制备方面具有较好的应用性,如提高锂离子电池动力汽车聚乙烯(PE)隔膜的耐温性等。本文研究了偏压对射频等离子体沉积Si/SiOx薄膜孔隙率的影响,如图1所示,发现随着偏压的提高,Si/SiOx沉积薄膜的孔隙率有较大幅度提高,薄膜由纳米晶颗粒串联连接而成。
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