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  5. Large-Area High-Resolution Nanostructures Fabricated by Broadband XIL Technology and Its Application

Large-Area High-Resolution Nanostructures Fabricated by Broadband XIL Technology and Its Application

来源 :The 6th International Conference on Nanoscience and Technolo | 被引量 : 0次 | 上传用户：dillon100200
【摘 要】
：
　　A large area exposure technology with high-resolution nanostructure using broadband soft X-ray interference lithography(XIL)is developed by beamline BL08U1B
【作 者】
：
Chaofan Xue Shumin Yang Haigang Liu Liansheng Wang Jun Zhao Yanqing Wua Renzhong Tai 
【机 构】
：
Shanghai institute of applied physics,Chinese Academy of Sciences,China
【出 处】
：
The 6th International Conference on Nanoscience and Technolo
【发表日期】
：
2015年期
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　　A large area exposure technology with high-resolution nanostructure using broadband soft X-ray interference lithography(XIL)is developed by beamline BL08U1B at SSRF [1].
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