A novel fabrication process of digital encoding grating ruler for optical displacement sensors

来源 :The 4th Advances in Optoelectronics and Micro/nano-optics (A | 被引量 : 0次 | 上传用户：smarten

【摘要】

：

　　Due to its immunity to electromagnetic interference,optical displacement sensors have become an essential component in the aircraft control system.Among tho

【作者】

：

YuWang;ZhengkunLiu;HuoyaoChen;YilinHong;ShaojunFu;

【机构】

：

University of Science and Technology of China

【出处】

：

The 4th Advances in Optoelectronics and Micro/nano-optics (A

【发表日期】

：

2014年期

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　　Due to its immunity to electromagnetic interference,optical displacement sensors have become an essential component in the aircraft control system.Among those optical sensors,digital wavelength encoding optical absolute displacement sensor is quite promising.

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A novel fabrication process of digital encoding grating ruler for optical displacement sensors

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