Progress of Soft X-ray Single-order Diffraction Grating Development

来源 :LIMIS 2016——The 4th International Symposium on Laser Interac | 被引量 : 0次 | 上传用户：zhongli2511

【摘要】

：

　　All conventional x-ray dispersive elements including multilayers,crystals and diffraction gratings provide multi-order diffraction spectra,which bring probl

【作者】

：

Leifeng Cao Changqing Xie

【机构】

：

LaserFusionResearchCenter,CAEP,P.O.Box919-986-6,MianyangSichuan,P.R.ChinaInstituteofMicroelectronics

【出处】

：

LIMIS 2016——The 4th International Symposium on Laser Interac

【发表日期】

：

2016年11期

【关键词】

：

single-order diffraction grating soft X-ray nano fabrication

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　　All conventional x-ray dispersive elements including multilayers,crystals and diffraction gratings provide multi-order diffraction spectra,which bring problems in spectroscopy application especially in the region of from VUV to soft x-ray region.

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Progress of Soft X-ray Single-order Diffraction Grating Development

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