Structure and dielectric properties of Ba0.955Ca0.045Zr0.17Ti0.83O3 thin films prepared by chemical

来源 :2010年无铅高性能压电材料国际研讨会(IWLFFM-2010) | 被引量 : 0次 | 上传用户:yywachself
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Lead-free ferroelectric Ba0.955Ca0.045Zr0.17Ti0.83O3 (abbreviated as BCZT) thin films were grown on Pt/Ti/SiO2/Si substrates by chemical solution deposition process using spin coating technique.Structural and morphological characterizations were performed using X-ray diffractometry and scanning electron microscope.
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