Optical Tailoring of RF Magnetron Sputtered ZnO Thin Films

• 作 者: Ali Hassan Chao Feng Saira Riaz Shahzad Naseem Yijian Jiang
• 机 构: Institute of Laser Engineering,Beijing University of Technology,Beijing,China,100124
• 出 处: 中国物理学会2016年秋季会议
• 发表日期: 2016年5期
• 关键词: ZnO RF magnetron sputtering spectroscopic ellipsometer optoelectronic

　　Pure and N2 doped ZnO thin films of thickness ranging~300 – 500 nm with 5,10,15,20,25,and 50 sccm inflow ratios of N2 are deposited on glass substrate by means of RF magnetron sputtering system,and observed the dependence of optical properties of ZnO by the function of doping with the help of spectroscopic ellipsometer.And found that the N2-inflow highly affects the optical properties of ZnO thin films.Even the high transmittance of about 97%is achieved and absorbance graph also shows that slight variation in N2 inflow affects the absorbance,which is maximum with in UV region.