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SiNx/TiN multilayer nanocomposites phase has attracted a considerable attention for its outstanding mechanical properties.Incoherence between lattices of α-Si3N4 and TiN leads to the formation of an amorphous SiNx/TiN nanocomposites interface at the non-equilibrium growth conditions.The detailed structural information of the three-dimensional amorphous SiNx/TiN nanocomposites interface would not be obtained by standard analytical techniques, such as tunneling electron microscopy (TEM).Therefore, the recent experiments of the epitaxially grown SiNx/TiN interface, which reported growth a cubic surface SiNx phase deposited on TiN(001).However, the surface SiNx/TiN(001) requires further analysis because of coherent surface reconstructions with 1×5 and 3×3 periodicities.