【摘 要】
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compared with atmospheric-pressure thermal plasmas and low-pressure cold plasmas,meso-plasmas generated at a moderate pressure level,e.g.,0.1~10 Torr or 1~1
【机 构】
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DepartmentofEngineeringPhysics,TsinghuaUniversity,Beijing100084,P.R.China
【出 处】
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第8届中日先进等离子体科学技术会议( 8th International Workshop on Plasma Scie
论文部分内容阅读
compared with atmospheric-pressure thermal plasmas and low-pressure cold plasmas,meso-plasmas generated at a moderate pressure level,e.g.,0.1~10 Torr or 1~100 Torr,have outstanding features,such as low gas temperature,high number densities of reactive species,high chemical reactivity,and large plasma volume.These outstanding features of the meso-plasma sources make them be of importance for theoretical studies and actual applications,e.g.,materials processing with high treatment efficiency,investigation of non-equilibrium transport processes in a plasma system,etc.
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