Role of plasma density in dust generation, growth, and transport

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：caikesbad

【摘要】

：

Dusty plasmas,which are ionized gases containing small solid particles,have been widely studied over the years,from processing plasma to fusion plasmas.

【作者】

：

Kil-Byoung Chai Wonho Choe

【机构】

：

Department of Physics, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseung-gu

【出处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

dusty plasmas plasma enhanced chemical vapor deposition capacitively-coupled pla

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Dusty plasmas,which are ionized gases containing small solid particles,have been widely studied over the years,from processing plasma to fusion plasmas.

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Role of plasma density in dust generation, growth, and transport

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