In-situ Infrared Spectroscopy of Plasma Induced Surface Reactions

来源 :The 8th Asian-European International Conference on Plasma Su | 被引量 : 0次 | 上传用户：neu20063043

【作者】

：

M.Shinohara K.Hara Y.Takami Y.Takaki A.Fukae K.Amano Matsuda H.Fujiyama

【机构】

：

Graduate School of Engineering,Nagasaki Univ.,Nagasaki 852-8521,Japan

【出处】

：

The 8th Asian-European International Conference on Plasma Su

【发表日期】

：

2011年1期

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