Raman Scattering Studies on CVD Grown Cubic SiC Thin Films on Si

来源 :第十八届全国光散射学术会议 | 被引量 : 0次 | 上传用户：fankyxu

【摘要】

：

Cubic (3C)-SiC films were grown on Si (100) substrate by chemical vapor deposition (CVD).Silicon carbide (SiC) is a wide gap semiconductor material.At the high

【作者】

：

CHEN Shuai XIE Deng QIU Zhi-ren TIN Chin-che WANG Hong-chao MEI Ting WAN Ling-yu FENG ZheChuan

【机构】

：

CollegeofPhysicsScience&Technology,GuangxiKeyLaboratoryfortheRelativisticAstrophysics,Laboratoryofop

【出处】

：

第十八届全国光散射学术会议

【发表日期】

：

2015年10期

下载到本地 , 更方便阅读

下载此文赞助VIP

声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架

论文部分内容阅读

Cubic (3C)-SiC films were grown on Si (100) substrate by chemical vapor deposition (CVD).Silicon carbide (SiC) is a wide gap semiconductor material.At the high temperature, it still maintains the low intrinsic carrier concentration, high break down electric field, high saturated electron drift velocity, high thermal conductivity and other features[1].In this paper, Raman scattering and spectroscopic ellipsometry (SE) were used to characterize several 3C-SiC films.

其他文献

Magnetic excitations and strong magneto-elastic coupling in model quasi-1D spin-12 spiral magnet CuB

CuBr2 is a type-II multiferroic compound, with a high critical temperature of 73 K and a very simple crystal structure[1].Our Raman and inelastic neutron scatte

会议

Postzygotic single-nucleotide mosaicism in healthy individuals and parents of children with Dravet S

Postzygotic single-nucleotide mutations (pSNMs) have been studied in cancer and a few other overgrowth human disorders at whole-genome scale and found to play c

会议

NCC-AUC an AUC optimization method to identify multi-biomarker panel for cancer prognosis from genom

Motivation: In prognosis and survival studies, an important goal is to identify multi-biomarker panels with predictive power using molecular characteristics or

会议

Modulation of translational efficiency by Kozak sequence

Regulation of protein expression level is one of the most fundamental processes, although mRNA level has been for long used to approximate protein level in a ce

会议

Profiling the transcription factor regulatory networks of human cell types

Neph et al.(2012) (Circuitry and dynamics of human transcription factor regulatory networks.Cell, 150: 1274-1286) reported the transcription factor (TF) regulat

会议

Comprehensive pan-cancer stratification analysis of key genetic and epigenetic features reveals esse

Background: Identification of tumor heterogeneity and genomic similarities across different cancer types is essential to the design of effective stratified trea

会议

Pressure-Dependent Relaxation Dynamics of Excitons in Conjugated Polymer Film

Conjugated polymers have attracted much attention because of their unique features like low weight, low fabrication cost, and great potential in large-area flex

会议

DnaMe--环境DNA甲基化数据库

环境暴露可以改变基因的表观遗传状态,如DNA甲基化的改变.基因的表观遗传学变化是链接环境因素与人体健康的一个重要纽带,可以反映人体受环境因素的影响,以及潜在的健康风险.

会议

金纳米粒子表面等离子体共振对有机发光二极管性能的提升

有机/聚合物发光二极管在平板照明和显示等方面有重要应用前景,并且具有成本低和制备过程简单等优点,近年来受到格外重视.提高电致发光效率以及提高发光的稳定性是当前的研究

会议

Molybdenum disulfide quantum dots as a fluorescence probe for gold ions sensing in water and synthet

Gold species have been widely used in chemistry, medicine and biology in the form of catalysts, drugs and nanoparticles respectively, in the last decades.At the

会议

Raman Scattering Studies on CVD Grown Cubic SiC Thin Films on Si

其他学术论文