Process development on high performance system chip with a MWCNTs-assisted sensing array for toxic g

• 作 者: P.K.Chuang L.C.Wang C.T.Kuo
• 机 构: Dept. of Mat. Sci. and Eng., National Chiao Tung University, Hsinchu 300, Taiwan
• 出 处: 第七届海峡两岸薄膜科学与技术研讨会
• 发表日期: 2011年9期
• 关键词: Multiwalled carbon nanotubes (MWCNTs) gas sensor toxic gases

For room temperature toxic gas sensing,a system chip with a MWCNTs (multiwalled carbon nanotubes)-assisted array of 30 sensors (2 sensors for each of 15 sensor types) was successfully developed.The testing gases include 4 simulants of chemical warfare agents (CWAs): dichloromethane (DCM),acetonitrile (ACN),2-chloroethyl ethyl sulfide (2-CEES),and dimethyl-methyl phosphonate (DMMP).