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运用光楔对发散角较大、光束品质不够好的ＫｒＦ激光光束进行了分光测量，测量了ＫｒＦ激光光束的一维能量分布和远场发散角；具体计算了ＫｒＦ激光光束剖面的能量密度分布的均匀性。
The KrF laser beam with large divergence angle and poor beam quality was measured by optical wedge. The KrF laser beam’s one-dimensional energy distribution and far-field divergence angle were measured. The energy density distribution of KrF laser beam profile was calculated Uniformity.