【摘 要】
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We present data on two decisive process steps within the heterojunction silicon solar cell production flow:Wet chemical processing and physical vapor deposition (PVD) of transparent conductive oxide (
【机 构】
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Crystalline PV,Singulus Technologies AG process d
【出 处】
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SNEC 第十届(2016)国际太阳能产业及光伏工程(上海)论坛
论文部分内容阅读
We present data on two decisive process steps within the heterojunction silicon solar cell production flow:Wet chemical processing and physical vapor deposition (PVD) of transparent conductive oxide (TCO) as collecting electrodes and full area metallization of the cells rear side,respectively.We will introduce a new process sequence for the wet chemical treatment of heterojunction solar cells (pre clean,saw damage etch,texture,metal clean,oxide etch and drying) with new,cost saving bath compositions and reduced waste water formation.Sputtered indium tin oxide (ITO) layers,derived from a PVD mass production tool were characterized with respect to optical properties and sheet resistance.
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