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In the past twenty years, the applications of Microelectromechanical Systems (MEMS) technology to the fabrication of mechanical devices greatly stimulated extensive research in semiconductor microsensors and microactuators.Nano-device and Nanoelectromechanical Systems (NEMS) is very significate breakthrough for triditional MEMS and nanotechnology, which is not only advantage of batch processing to address the manufacturing, but also performance requirements of the nano-device and nano-sensor industry.