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  5. Investigation of HTS Magnetron Cathode and its Cryogenic System

Investigation of HTS Magnetron Cathode and its Cryogenic System

来源 :第八届亚洲应用超导会议 | 被引量 : 0次 | 上传用户：q999666
【摘 要】
：
　　The HTS(high temperature superconductivity) magnetron cathode could generate strong magneticfield which is higher than that of conventional PM (permanent ma
【作 者】
：
Qingquan Qiu Fei Qu Liwei Jing Naihao Song Guomin Zhang Liye Xiao 
【机 构】
：
KeyLaboratoryofAppliedSuperconductivityforChineseAcademyofSciencesBeijing100190China;Instituteofelec
【出 处】
：
第八届亚洲应用超导会议
【发表日期】
：
2015年11期
【关键词】
：
High temperature superconductivity magnetron sputtering cathode magnetic field c 
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　　The HTS(high temperature superconductivity) magnetron cathode could generate strong magneticfield which is higher than that of conventional PM (permanent magnet) ones,therefore a lot ofspecial films could be prepared in lower gas pressure and longer target-substrate space.One 3-inchcircular planar magnetron cathode excited by HTS magnet is designed,fabricated and tested.TheHTS coils are fabricated with YBCO tapes,and the iron yoke is fabricated with 1J22 alloy.
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