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Todays photovoltaic industry is vigorously moving on pathways toward low cost, high efficiency solar cells.Effective surface passivation of p-type Si surfaces and superior light trapping are keys to achieve efficiency improvements in cSi solar cells.Passivated emitter and rear cell (PERC) architectures are explored using aluminium oxide/silicon nitride film stacks to improve p-type cell performance on mono and multi crystalline cells as well as n-type devices.