Supercritical fluid deposition of metals and metal oxides for electronic device applications

来源 :第七届中日化工学术研讨会 | 被引量 : 0次 | 上传用户：fuzhi2009

【摘要】

：

　　Novel chemical deposition technology called supercritical fluid deposition(SCFD)is an emerging technology,where metal organic compounds dissolved in supercr

【作者】

：

Takeshi Momose

【机构】

：

Department of Materials Engineering,The University of Tokyo,7-3-1 Hongo,Bunkyo-ku,Tokyo,113-8656,Jap

【出处】

：

第七届中日化工学术研讨会

【发表日期】

：

2015年期

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　　Novel chemical deposition technology called supercritical fluid deposition(SCFD)is an emerging technology,where metal organic compounds dissolved in supercritical carbon dioxide are reduced/oxidized on a heated substrate to make film deposition.

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Supercritical fluid deposition of metals and metal oxides for electronic device applications

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