Synthesis and Characterizations of Nano-composite Cr-B-W-N coatings by Reactive DC Magnetron Sputter

• 作 者: Lin-YungTseng[1]Jhewn-KuangChen[1]Wan-YuWu[2]Chi-LungChang[3]Kai-HungHsu[4]
• 机 构: Institute of Materials Science and Engineering, National Taipei University of Technology,Taiwan, R.O
• 出 处: 第七届海峡两岸薄膜科学与技术研讨会
• 发表日期: 2011年期

Nanocomposite Cr-W-B-N coatings with various tungsten contents were synthesized on silicon wafer substrates.The used technique is a DC reactive magnetron co-sputtering deposition equipped with a Cr-B alloy target with 20 at.％ B and a W target in a mixed argon/nitrogen plasma atmosphere.Composition and microstructure of the obtained coatings were investigated using X-ray diffraction,X-ray Photoelectron Spectroscope and transmission electron microscope while the micro-hardness was measured using a depth-sensing nano-indenter.