Graphene Membrane Based Capacitive Micromachined Ultrasonic Transducer (CMUT) for Ultra-low Pressure

来源 :第十八届中国科协年会 | 被引量 : 0次 | 上传用户：gogouu

【摘要】

：

【作者】

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Ping LI Libo ZHAO Zhuangde JIANG Zhikang LI Yong XIA Yulong ZHAO

【机构】

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State Key Laboratory for Manufacturing Systems Engineering,Collaborative Innovation Center of Suzhou

【出处】

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第十八届中国科协年会

【发表日期】

：

2016年3期

【关键词】

：

CMUT graphene membrane ultra-low pressure sensitivity linearity

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　　To date,there are few researches on capacitive micromachined ultrasonic transducer (CMUT) to measure the ultra-low pressure.The graphene-based CMUT was proposed for the measurement of the ultra-low pressure.The array cavities were etched on a silicon substrate,and a single-layer graphene membrane was transferred directly to be attached on the substrate to cover the cavities,then the CMUT was fabricated.We employed the finite element method (FEM) simulation to investigate the sensing performance of this new CMUT structure.The measuring sensitivity of the graphene-based CMUT was analyzed with the value of 20.34 kHz/Pa,which was nearly 600 times higher than that of the silicon membrane based CMUT (30 Hz/Pa).The results showed that the proposed graphene-based CMUT has good linearity and high sensitivity for the ultra-low pressure detection.

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Graphene Membrane Based Capacitive Micromachined Ultrasonic Transducer (CMUT) for Ultra-low Pressure

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