论文部分内容阅读
Accuracy improvement of MEMS gyros requires not only microelectronic development but MEMS g.vros also needs the investigations of the mathematical model of sensitive element dynamics [1-3].In the present paper, we study the errors of the vibrating microgyroscope which arise because of nonlinear dynamics of a sensitive element.MEMS tuning fork gyroscope with elastic rods is considered.Using hypothesis inextensible sensitive element midline, nonlinear differential equations of bending vibrations of sensitive element on the moving basis are derived.Free nonlinear vibrations of gyroscopes as the flexible rod are studied.The internal friction in rods of gyro is described by Kelvin-Voigt model.