【摘 要】
：
The titanium carbide/amorphous carbon nanocomposite films were deposited on silicon substrate by filtered cathodic vacuum arc (FCVA) technology,The composit
【机 构】
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Radiation Beam Technology and Modification of Material Key Lab in University,Beijing Normal Universi
【出 处】
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Fifth International Conference on Surface Engineering(第五届表面工
论文部分内容阅读
The titanium carbide/amorphous carbon nanocomposite films were deposited on silicon substrate by filtered cathodic vacuum arc (FCVA) technology,The composition and structures of the titanium carbide/amorphous carbon nanocomposite films were studied by scan electronic spectroscopes,X ray diffraction,Raman and X ray photoelectron spectroscopes.The effects of duct current and C2H2 flow rate on the composition,structure,mechanical properties and tribological properties of the titanium carbide/amorphous carbon nanocomposite films were investigated.The results shown that the deposition rate increased but the Ti content decreased as the C2H2 flow rate and duct current increased.The hardness and elastic modulus of the titanium carbide/amorphous carbon nanocomposite films were higher than 50 Gpa and 400 Gpa respectively determined by nano indentation tests.The friction performance of the titanium carbide /amorphous carbon nanocomposite films were also studied.
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