Preparation of Polycrystalline Silicon Thin Film on Glass by Aluminum-Induced Layer Exchange

来源 :The 8th Asian-European International Conference on Plasma Su | 被引量 : 0次 | 上传用户：SparrowHawk

【作者】

：

Zhou Wang Jian Cao Chuanqi Fu Takayuki Murotani Bin Li

【机构】

：

Surface Engineering Centre,Dalian University,Dalian 116622,China

【出处】

：

The 8th Asian-European International Conference on Plasma Su

【发表日期】

：

2011年1期

【关键词】

：

Polycrystalline silicon thin film PVD ALILE

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Preparation of Polycrystalline Silicon Thin Film on Glass by Aluminum-Induced Layer Exchange

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