Structure and Corrosion Resistance in Physiological Solution of Hf-Si-N Films Deposited by IBAD

来源 :The 8th Asian-European International Conference on Plasma Su | 被引量 : 0次 | 上传用户：liangsfr

【作者】

：

Guo Jin Jinlong Hao Xiufang Cui Erbao Liu Songbo Wei Tianmin Shao

【机构】

：

Center for Biomedical Materials and Engineering,School of Materials Science and Chemical Engineering

【出处】

：

The 8th Asian-European International Conference on Plasma Su

【发表日期】

：

2011年1期

【关键词】

：

Hf-Si-N Thin films Structure Corrosion Physiological solution

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Structure and Corrosion Resistance in Physiological Solution of Hf-Si-N Films Deposited by IBAD

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