Highly Sensitive O2 Sensors of W6+-TiO2 Thin Film Prepared by R.F.Magnetron Sputtering Based on PN J

来源 :The 8th Asian-European International Conference on Plasma Su | 被引量 : 0次 | 上传用户：yanghuayejuan

【作者】

：

Huijun Zhang Tingyu Han Jingliang Cheng Tooru Harigai Akimitsu Hatta Dianzhong Wen

【机构】

：

School of Electronics Engineering,Heilongjiang University,Harbin 150080,China

【出处】

：

The 8th Asian-European International Conference on Plasma Su

【发表日期】

：

2011年1期

【关键词】

：

R.F. magnetron sputter O2 sensors PN junction Hetero structure Quantum-tunnel ef

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Highly Sensitive O2 Sensors of W6+-TiO2 Thin Film Prepared by R.F.Magnetron Sputtering Based on PN J

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